%0 Journal Article %J J. Electrochem. Soc.Journal of the Electrochemical Society %D 1989 %T Scanning electrochemical microscopy: the application of the feedback mode for high resolution copper etching. %A Mandler, Daniel %A Bard, Allen J. %K redox couple electrochem microscopy patterning copper %K scanning electrochem microscopy patterning copper %X The etching is described of Cu circuit paths using a scanning electrochem. microscope supplied with a redox couple to induce feedback. Very small dimensions (<0.6 μm) are achieved. [on SciFinder(R)] %B J. Electrochem. Soc.Journal of the Electrochemical Society %V 136 %P 3143 - 4 %8 1989/// %@ 0013-4651 %G eng %N 10