Micro- and nanopatterning using scanning electrochemical microscopy.

Citation:

Mandler D. Micro- and nanopatterning using scanning electrochemical microscopy., in Scanning Electrochem. Microsc. (2nd Ed.). CRC Press ; 2013 :489 - 524.

Date Presented:

2013///

Abstract:

A review. The following topics are discussed: Patterning by the Direct and Feedback modes of the SECM (Semiconductor, metal, and inorg. material etching and deposition; deposition of conducting polymers; self-assembled monolayers, polymers, and biomol. patterning); Speed of patterning, resoln., and scope of materials and approaches. [on SciFinder(R)]

Notes:

CAPLUS AN 2013:1282783(Conference; General Review)