Scanning electrochemical microscopy: the application of the feedback mode for high resolution copper etching.

Citation:

Mandler D, Bard AJ. Scanning electrochemical microscopy: the application of the feedback mode for high resolution copper etching. J. Electrochem. Soc.Journal of the Electrochemical Society. 1989;136 (10) :3143 - 4.

Date Published:

1989///

Abstract:

The etching is described of Cu circuit paths using a scanning electrochem. microscope supplied with a redox couple to induce feedback. Very small dimensions (<0.6 μm) are achieved. [on SciFinder(R)]

Notes:

CAPLUS AN 1989:645365(Journal)