A channel waveguide constructed in potassium lithium tantalate niobate (KLTN) substrate by the implantation of He+ ions at 1.65 MeV is presented. The waveguide has a trapezoidal profile with a crystalline KLTN core surrounded by amorphized KLTN created by the implantation. The implantation was done through a 2 μm thick gold stopping mask with a trapezoidal groove. During the implantation, the contour of the groove was replicated beneath the surface of the substrate forming the trapezoidal cladding of the channel waveguide. The channel waveguide is designed as the interconnecting element in electro-optical integrated circuits. [ABSTRACT FROM AUTHOR]Copyright of Applied Physics Letters is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)